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Estimating Damping in Microresonators by Measuring Thermomechanical Noise using Laser Doppler Vibrometry

机译:通过使用激光多普勒振动法测量热机械噪声来估计微谐振器中的阻尼

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摘要

The Fluctuation-Dissipation Theorem establishes the fundamental links between thermomechanical noise and damping. In this paper, we bridge the gap between theory and practice by developing protocols for estimating dissipation in low-loss microresonators by measuring thermomechanical noise using laser Doppler vibrometry. The measurement does not require external actuation of the device, and damping can be estimated without relying upon knowledge of material properties, device dimensions, or structural stiffness. The power spectral density of velocity and displacement noise is computed using a direct method that avoids segmenting the measurements in the time domain, thereby avoiding any bias in the estimation of the quality factor. We demonstrate the implementation of the protocol by measuring damping at room temperature and low pressure in four silicon-based microcantilever resonators with natural frequencies ranging from 17.6 to 26.7 kHz, and quality factors ranging from 2x10⁴ to 2x10⁵ . The accuracy of noise-based estimates is evaluated by comparison with values of the log decrement measured under free decay.
机译:波动耗散定理建立了热机械噪声和阻尼之间的基本联系。在本文中,我们通过开发用于通过使用激光多普勒振动法测量热机械噪声来估计低损耗微谐振器耗散的协议,从而弥合了理论与实践之间的鸿沟。该测量不需要装置的外部致动,并且可以在不依赖于材料特性,装置尺寸或结构刚度的知识的情况下估计阻尼。速度和位移噪声的功率谱密度是使用直接方法计算的,该方法避免了在时域中对测量进行分段,从而避免了质量因数估计中的任何偏差。我们通过测量四个硅基微悬臂梁谐振器在室温和低压下的阻尼来演示该协议的实现,这些谐振器的固有频率范围为17.6至26.7 kHz,品质因数范围为2x10⁴至2x10⁵。通过与在自由衰减下测得的对数减量值进行比较,可以评估基于噪声的估计的准确性。

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